Dektak

6M

Wet Processing / Clean 6"Dektak 6M family

Research Quality: 30% complete

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Dektak6M

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Wafer size

Optics

Steps from 260 microns down to 10 nm^[1]

What is it?

The Dektak 6M Stylus Profilometer is listed as cleanroom instrumentation for metrology, microscopy/surface analysis, and surface analysis. The source states that it is a film step-height measurement tool capable of measuring steps from 260 microns down to 10 nm, and that it can also profile surface topography and measure surface roughness in the nanometer range.

What can it run?

Process applications and technology nodes documented for this tool.

Film step-height measurement
Surface topography profiling
Surface roughness measurement

What do the numbers mean?

Optics & imaging1

Measurement range: Steps from 260 microns down to 10 nm^[1]

Dimensions & facilities1

Measured feature: Film step height^[1]

Configuration & options7

Instrument type: Stylus profilometer^[1]
Equipment type: Cleanroom Instrumentation; Metrology; Microscopy/Surface Analysis; Surface Analysis^[1]
Additional uses: Surface topography profiling and surface roughness measurement in the nanometer range^[1]
Stylus radius: 25-micron radius high aspect ratio stylus^[1]
Maximum acceptable sample size: 6 inches^[1]
Location: FNT 4.106^[1]
Contact: Dr. Raluca Gearba^[1]

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Where are the manuals?

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the 6M are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 6M are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 6M are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 6M are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 6M are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 6M is not on record.
Answerable by: an OEM datasheet or a fab qualification report