Waferpedia

Tool family

Denton Vacuum Integrity-50

Denton Vacuum Integrity-50 is a fully automated ophthalmic coating system.

Models in this family

  1. The Denton Vacuum Integrity-50 is a fully automated ophthalmic coating system with vacuum chamber, pumping, gauging, pressure/flow control, substrate fixturing/rotation, heater, ion source, electron beam evaporation source, low voltage resistance sources, source shutters, and deposition control.