Denton Vacuum
Integrity-50
The Denton Vacuum Integrity-50 is a fully automated ophthalmic coating system. The Denton Vacuum Integrity-50 uses a 304 stainless steel vacuum chamber. The Denton Vacuum Integrity-50 vacuum chamber measures 50 in wide by 50 in deep by 51 in high.[1][2]
Power
3 kW radiant quartz heater assembly[1]
Vacuum
304 stainless steel[1]
Gas delivery
Two MKS 2179 mass flow controllers[1]
Optics
Six pocket, 25 cc per pocket[1]
What it is
The Denton Vacuum Integrity-50 is a fully automated ophthalmic coating system. The Denton Vacuum Integrity-50 includes a vacuum chamber system, power and signal distribution, a pumping system, vacuum valves and gauging, pressure and flow control, substrate fixturing and rotation, a six-circuit water manifold, a substrate heater system, a CC-105 ion source, an electron beam evaporation source, low voltage resistance sources, source shutters, Plasar hardware, deposition control, and control and automation.[1][2]
Where it fits in the process flow
General reference — not yet source-verifiedOphthalmic coating tools are used after substrate fabrication, surfacing, and cleaning, when the optical part is ready to receive functional thin films. Ophthalmic coating tools are followed by inspection, performance verification, and any subsequent finishing or packaging steps required for the coated optic.
Applications
The Denton Vacuum Integrity-50 is used for ophthalmic coating and vacuum deposition.[2]
- Ophthalmic coating
- Vacuum deposition
What do the numbers mean?
Power & electrical3
- Low voltage resistance power supply
- Denton Vacuum 4.0 kW two position (A/B) low voltage resistance evaporation power supply[1]
Vacuum & pumping8
Wafer handling1
Gas & chemistry1
Optics & imaging2
- Electron beam source
- TFI-Telemark TFI-271-18 six pocket rotary crucible electron beam source[1]
Control & software2
- Deposition controller
- Inficon XTC/2 quartz crystal controller with dual crystal sensor head[1]
Configuration & options1
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Vacuum chamber material304 stainless steel[1]
- Vacuum chamber dimensions50 in wide x 50 in deep x 51 in high[1]
- Pumping system diffusion pumpVarian HS-20 diffusion pump[1]
- Pumping system mechanical pumpEdwards E1M275 single-stage rotary vane mechanical pump, 206 cfm[1]
- Pumping system roots blowerEdwards EH500A roots blower, 355 cfm[1]
- Polycold systemPolycold PFC/PFC1100, 2 circuit, fast cycle cryogenic cooler[1]
- Vacuum gaugingTwo Leybold Inficon ITR100 wide-range Bayard-Alpert ionization gauge tubes and two Leybold Inficon TTR211S Pirani transmitters[1]
- Process gas controlTwo MKS 2179 mass flow controllers[1]
- Substrate heater3 kW radiant quartz heater assembly[1]
- Ion sourceDenton Vacuum CC-105 cold cathode ion source[1]
- Electron beam power supplyTFI-Telemark ST-6 electron beam gun power supply, 6.0 kW[1]
- Low voltage resistance power supplyDenton Vacuum 4.0 kW two position (A/B) low voltage resistance evaporation power supply[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What type of equipment is the Denton Vacuum Integrity-50?
The Denton Vacuum Integrity-50 is a fully automated ophthalmic coating system.[1][2]
What are the main pumping components in the Denton Vacuum Integrity-50?
The Denton Vacuum Integrity-50 uses a Varian HS-20 diffusion pump, an Edwards E1M275 single-stage rotary vane mechanical pump rated at 206 cfm, an Edwards EH500A roots blower rated at 355 cfm, a diffusion pump cryotrap, a chamber-mounted Meissner trap, and a Polycold PFC/PFC1100 two-circuit fast-cycle cryogenic cooler.[1][2]
How does the Denton Vacuum Integrity-50 monitor vacuum?
The Denton Vacuum Integrity-50 uses two Leybold Inficon ITR100 wide-range Bayard-Alpert ionization gauge tubes and two Leybold Inficon TTR211S Pirani transmitters. The Denton Vacuum Integrity-50 displays pressure readings on the control screen and interfaces the gauge outputs to PLC analog inputs for process control.[1][2]
Not publicly documented
The following facts about the Integrity-50 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Integrity-50 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Integrity-50 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Integrity-50 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Integrity-50 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Integrity-50 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]web.archive.org — web.archive.orgweb.archive.org
- [2]Integrity-50 — Denton Vacuum | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
Last updated Oct 17, 2026.