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Denton Vacuum

Integrity-50

Fully Automated Ophthalmic Coating SystemDenton Vacuum Integrity-50 family
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Integrity-50 — web.archive.org
Fig. 01Integrity-50web.archive.org[1]

Power

3 kW radiant quartz heater assembly[1]

Vacuum

304 stainless steel[1]

Gas delivery

Two MKS 2179 mass flow controllers[1]

Optics

Six pocket, 25 cc per pocket[1]

What is it?

The Integrity-50 is a fully automated ophthalmic coating system from Denton Vacuum. The source describes a vacuum chamber system with cabinets and power/signal distribution, pumping system, vacuum valves and gauging, pressure/flow control, substrate fixturing/rotation, a six-circuit water manifold, a substrate heater system, a CC-105 ion source, an electron beam evaporation source, low voltage resistance sources, source shutters, Plasar hardware, and deposition control.

What can it run?

Process applications and technology nodes documented for this tool.

  • Ophthalmic coating
  • Vacuum deposition

What do the numbers mean?

Power & electrical3

Substrate heater
3 kW radiant quartz heater assembly[1]
Accurate?
Electron beam power supply
TFI-Telemark ST-6 electron beam gun power supply, 6.0 kW[1]
Accurate?
Low voltage resistance power supply
Denton Vacuum 4.0 kW two position (A/B) low voltage resistance evaporation power supply[1]
Accurate?

Vacuum & pumping8

Vacuum chamber material
304 stainless steel[1]
Accurate?
Vacuum chamber dimensions
50 in wide x 50 in deep x 51 in high[1]
Accurate?
Pumping system diffusion pump
Varian HS-20 diffusion pump[1]
Accurate?
Pumping system mechanical pump
Edwards E1M275 single-stage rotary vane mechanical pump, 206 cfm[1]
Accurate?
Pumping system roots blower
Edwards EH500A roots blower, 355 cfm[1]
Accurate?
Polycold system
Polycold PFC/PFC1100, 2 circuit, fast cycle cryogenic cooler[1]
Accurate?
Vacuum gauging
Two Leybold Inficon ITR100 wide-range Bayard-Alpert ionization gauge tubes and two Leybold Inficon TTR211S Pirani transmitters[1]
Accurate?
Ion source
Denton Vacuum CC-105 cold cathode ion source[1]
Accurate?

Wafer handling1

Substrate rotation system
Standard direct drive, single rotation system[1]
Accurate?

Gas & chemistry1

Process gas control
Two MKS 2179 mass flow controllers[1]
Accurate?

Optics & imaging2

Electron beam source
TFI-Telemark TFI-271-18 six pocket rotary crucible electron beam source[1]
Accurate?
Electron beam source crucible capacity
Six pocket, 25 cc per pocket[1]
Accurate?

Control & software2

Variable flow controller
MKS250C PID Controller configured for remote setpoint control[1]
Accurate?
Deposition controller
Inficon XTC/2 quartz crystal controller with dual crystal sensor head[1]
Accurate?

Configuration & options1

System controllers enclosure
Two stand-alone NEMA 12 enclosures[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Vacuum chamber material304 stainless steel[1]
  • Vacuum chamber dimensions50 in wide x 50 in deep x 51 in high[1]
  • Pumping system diffusion pumpVarian HS-20 diffusion pump[1]
  • Pumping system mechanical pumpEdwards E1M275 single-stage rotary vane mechanical pump, 206 cfm[1]
  • Pumping system roots blowerEdwards EH500A roots blower, 355 cfm[1]
  • Polycold systemPolycold PFC/PFC1100, 2 circuit, fast cycle cryogenic cooler[1]
  • Vacuum gaugingTwo Leybold Inficon ITR100 wide-range Bayard-Alpert ionization gauge tubes and two Leybold Inficon TTR211S Pirani transmitters[1]
  • Process gas controlTwo MKS 2179 mass flow controllers[1]
  • Substrate heater3 kW radiant quartz heater assembly[1]
  • Ion sourceDenton Vacuum CC-105 cold cathode ion source[1]
  • Electron beam power supplyTFI-Telemark ST-6 electron beam gun power supply, 6.0 kW[1]
  • Low voltage resistance power supplyDenton Vacuum 4.0 kW two position (A/B) low voltage resistance evaporation power supply[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What type of system is the Integrity-50?

It is a fully automated ophthalmic coating system.[1]

What are the main vacuum-pumping components?

The pumping system includes a Varian HS-20 diffusion pump, an Edwards E1M275 single-stage rotary vane mechanical pump, an EH500A roots blower, a diffusion pump cryotrap, a chamber-mounted Meissner trap, and a Polycold PFC/PFC1100 cryogenic cooler.[1]

How is vacuum monitored?

Vacuum gauging uses two Leybold Inficon ITR100 ionization gauge tubes and two Leybold Inficon TTR211S Pirani transmitters, with readings displayed on the control screen and interfaced to PLC analog inputs for process control.[1]

What deposition sources are included?

The system includes a CC-105 ion source, an electron beam evaporation source, and low-voltage resistance sources.[1]

Not publicly documented

The following facts about the Integrity-50 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Integrity-50 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Integrity-50 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Integrity-50 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Integrity-50 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Integrity-50 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]web.archive.org — web.archive.orgweb.archive.org
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Last updated Jul 29, 2026.