Waferpedia

Tool family

EV Group 810LT

EV Grouplow temperature plasma activation system1 entry

EV Group 810LT is a low temperature plasma activation system with 3 process gases, manual wafer loading/unloading, and automated chamber closing/opening.

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Models in this family

  1. 810LT

    EV Group 810LT is a low temperature plasma activation system with 3 process gases, manual wafer loading/unloading, and automated chamber closing/opening.