Waferpedia

Tool family

Filmetrics F20

The Filmetrics F20 is an optical reflectometer used to measure film thicknesses of dielectrics, semiconductors, and thin metals.

Models in this family

  1. The Filmetrics F20 is an optical reflectometer used to measure film thicknesses of dielectrics, semiconductors, and thin metals.

    Cited variants

    DesignationGenerationVintageChangesSource
    F20-EXRUses spectral reflectance for ITO measurements and is described as having a wide 400-1700nm wavelength range for one-click analysis of ITO thickness.web.archive.org[1]
    F40Described as a Filmetrics optical reflectometer with a small spot for local areas, compared with the F20's large spot.cores.research.asu.edu[2]

Sources

Sources (2)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org
  2. [2]cores.research.asu.educores.research.asu.edu