Filmetrics
F20
Plate 01How to Measure Film Thickness using the Filmetrics® F20 Thin-Film Analyzer
KLA InstrumentsWatch on YouTubePlate 02F20 Hardware Installation
FilmetricsWatch on YouTubePlate 03Filmetrics F20 Thin Film Measuring System #61634
Bid ServicellcWatch on YouTubePlate 04How to Set Up the Filmetrics® F20 Thin-Film Analyzer
KLA InstrumentsWatch on YouTubePlate 05Filmetrics F20 System
Solutions PremierWatch on YouTubePlate 06How to Change the Lamp on the Filmetrics® F20 Thin-Film Analyzer
KLA InstrumentsWatch on YouTube
What is it?
What can it run?
Process applications and technology nodes documented for this tool.
- film thickness measurement
- measurement of dielectrics
- measurement of semiconductors
- measurement of thin metals
- semiconductor teaching labs
What do the numbers mean?
Optics & imaging3
Configuration & options4
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| F20-EXR | — | — | Uses spectral reflectance for ITO measurements and is described as having a wide 400-1700nm wavelength range for one-click analysis of ITO thickness. | web.archive.org[2] |
| F40 | — | — | Described as a Filmetrics optical reflectometer with a small spot for local areas, compared with the F20's large spot. | cores.research.asu.edu[1] |
What replaced it?
Related models
- siblingFilmetrics F40— Listed alongside the F20 as an optical reflectometer; the F40 is described as a small-spot tool for local areas, while the F20 is general purpose.source[1]
- siblingFilmetrics F10-HC— The F10-HC is based on the F20 platform.source[3]
- siblingFilmetrics F37— Listed on the same products overview navigation as related Filmetrics models.source[4]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the F20 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the F20 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the F20 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the F20 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the F20 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the F20 are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (6)Every fact above is drawn from these public sources
- [1]cores.research.asu.edu — cores.research.asu.educores.research.asu.edu
- [2]web.archive.org — web.archive.orgweb.archive.org
- [3]web.archive.orgweb.archive.org
- [4]web.archive.orgweb.archive.org
- [5]https://www.nanofab.utah.edu/wp-content/uploads/2022/08/tool-list.pdf — nanofab.utah.edunanofab.utah.edu
- [6]Equipment and rates | NanoFab | Core Facilities | ASU — cores.research.asu.educores.research.asu.edu
Last updated Jul 29, 2026.
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