Waferpedia

Tool family

Filmetrics F54-XY-200

The Filmetrics F54-XY-200 is an automated thickness mapping system with measurement range from 4 nm up to 35 µm.

Models in this family

  1. The Filmetrics F54-XY-200 is an automated thickness mapping system with measurement range from 4 nm up to 35 µm.