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Filmetrics

F54-XY-200

Automated Thickness Mapping SystemsFilmetrics F54-XY-200 family
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F54-XY-200 — epfl.ch
Fig. 01F54-XY-200epfl.ch[1]

  • Plate 01The Filmetrics® F54-XY Automated Thin Film Thickness Mapping System

    KLA InstrumentsWatch on YouTube

What is it?

The sources describe the Filmetrics F54-XY-200 as an Automated Thickness Mapping System. It is listed with measurement range from 4 nm up to 35 µm, spatial resolution of 33 µm with a 500 µm aperture, and support for mono-, bi-layer, and tri-layer stack measurements.

What can it run?

Process applications and technology nodes documented for this tool.

  • Thickness measurement
  • Thickness mapping
  • Mono-, bi-layer, and tri-layer stack measurements

What do the numbers mean?

Optics & imaging2

Measurement range
4 nm up to 35 µm[1]
Accurate?
Spatial resolution
33 µm (500 µm aperture)[1]
Accurate?

Configuration & options2

Supported measurement types
Mono, bi-layers and tri-layer stack measurements[1]
Accurate?
Category on source page
Automated Thickness Mapping Systems[1]
Accurate?
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the F54-XY-200 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the F54-XY-200 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the F54-XY-200 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the F54-XY-200 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the F54-XY-200 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the F54-XY-200 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]epfl.ch — epfl.chepfl.ch
  2. [2]https://www.epfl.ch/research/facilities/cmi/wp-content/uploads/2022/11/F54-XY-200-User-Manual.pdf — epfl.chepfl.ch
  3. [3]Metrology ‒ Center of MicroNanoTechnology CMi ‐ EPFL — epfl.chepfl.ch
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Last updated Jul 29, 2026.