Waferpedia

Tool family

Filmetrics F60

The Filmetrics F60 is a film thickness and index mapping instrument for production environments.

Models in this family

  1. The Filmetrics F60 is a film thickness and index mapping instrument for production environments.

    Cited variants

    DesignationGenerationVintageChangesSource
    F60-tBase family described as mapping film thickness and index for production environments.web.archive.org[1]
    F60-t-UV10nm-50µm thickness range; 200-1100nm wavelength range.web.archive.org[1]
    F60-t-NIR100nm-250µm thickness range; 950-1700nm wavelength range.web.archive.org[1]
    F60-t-EXR20nm-250µm thickness range; 380-1700nm wavelength range.web.archive.org[1]
    F60-t-UVX10nm-250µm thickness range; 200-1700nm wavelength range.web.archive.org[1]
    F60-t-XT10µm-1mm thickness range; 1590-1650nm wavelength range.web.archive.org[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org