F60

The Filmetrics F60 is a film thickness and index mapping instrument for production environments. The Filmetrics F60-t family maps film thickness and index and includes automatic notch finding, automatic on-board baselining, an enclosed measurement stage with motion interlock, an industrial computer with pre-installed software, and an option to upgrade to fully robotic wafer handling. The Filmetrics F60-t also includes SECS/GEM factory automation software.^[1][2][3]

The Filmetrics F60-t instruments are distinguished primarily by thickness and wavelength range. The F60-t has a thickness range of 20 nm to 50 µm and a wavelength range of 380 nm to 1050 nm. The F60-t-UV has a thickness range of 10 nm to 50 µm and a wavelength range of 200 nm to 1100 nm. The F60-t-NIR has a thickness range of 100 nm to 250 µm and a wavelength range of 950 nm to 1700 nm. The F60-t-EXR has a thickness range of 20 nm to 250 µm and a wavelength range of 380 nm to 1700 nm. The F60-t-UVX has a thickness range of 10 nm to 250 µm and a wavelength range of 200 nm to 1700 nm. The F60-t-XT has a thickness range of 10 µm to 1 mm and a wavelength range of 1590 nm to 1650 nm. Shorter wavelengths are used to measure thinner films, while longer wavelengths allow measurement of thicker, rougher, and more opaque films.^[1][3]

The Filmetrics F60-t is intended for production environments. The Filmetrics F60-t supports SECS/GEM factory automation software and can be upgraded to fully robotic wafer handling, which fits automated wafer-processing lines.^[1][2]

Film thickness mapping instruments are used wherever a process depends on controlling deposited, grown, or modified film thickness across a substrate. Film thickness mapping instruments are common in semiconductor, display, optical coating, and related manufacturing where uniformity and repeatability matter.