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Filmetrics

F60

Film thickness mapping instrumentFilmetrics F60 family
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F60 — web.archive.org
Fig. 01F60web.archive.org[1]
Preceded by
F50
This tool
F60
Succeeded by
Latest generation
All related

What is it?

The Filmetrics F60-t family is described as a film thickness and index mapping system for production environments. The source states that it includes automatic notch finding, automatic on-board baselining, an enclosed measurement stage with motion interlock, an industrial computer with pre-installed software, and an option to upgrade to fully robotic wafer handling. It also lists several thickness-range and wavelength-range variants within the F60-t family.

What can it run?

Process applications and technology nodes documented for this tool.

  • Production environments

What do the numbers mean?

Vacuum & pumping1

Included items
Integrated Stage/Spectrometer/Light Source Unit; 4", 6" and 200mm reference wafers; TS-Si02-4-7200 thickness standard; vacuum pump; hardcopy of operator's manual; connecting cables; spare lamp; tweezers[1]
Accurate?

Wafer handling1

Wafer handling upgrade
Option to upgrade to fully robotic wafer handling[1]
Accurate?

Optics & imaging6

F60-t wavelength range
380-1050nm[1]
Accurate?
F60-t-UV wavelength range
200-1100nm[1]
Accurate?
F60-t-NIR wavelength range
950-1700nm[1]
Accurate?
F60-t-EXR wavelength range
380-1700nm[1]
Accurate?
F60-t-UVX wavelength range
200-1700nm[1]
Accurate?
F60-t-XT wavelength range
1590-1650nm[1]
Accurate?

Control & software2

Computer
Industrial computer with pre-installed software[1]
Accurate?
Software updates
Free software updates[1]
Accurate?

Configuration & options14

Measurement capability
Maps film thickness and index[1]
Accurate?
Designed for
Production environments[1]
Accurate?
Automatic notch finding
Included[1]
Accurate?
Automatic on-board baselining
Included[1]
Accurate?
Measurement stage
Enclosed measurement stage with motion interlock[1]
Accurate?
Base family relationship
F60-t family maps film thickness and index just like the F50 products[1]
Accurate?
F60-t thickness range
20nm-50µm[1]
Accurate?
F60-t-UV thickness range
10nm-50µm[1]
Accurate?
F60-t-NIR thickness range
100nm-250µm[1]
Accurate?
F60-t-EXR thickness range
20nm-250µm[1]
Accurate?
F60-t-UVX thickness range
10nm-250µm[1]
Accurate?
F60-t-XT thickness range
10µm-1mm[1]
Accurate?
Optional accessories
NIST-traceable thickness standard; F60 chucks for 200mm and 300mm[1]
Accurate?
Materials library
Library with over 130 materials included with every system[1]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
F60-t——Base family described as mapping film thickness and index for production environments.web.archive.org[1]
F60-t-UV——10nm-50µm thickness range; 200-1100nm wavelength range.web.archive.org[1]
F60-t-NIR——100nm-250µm thickness range; 950-1700nm wavelength range.web.archive.org[1]
F60-t-EXR——20nm-250µm thickness range; 380-1700nm wavelength range.web.archive.org[1]
F60-t-UVX——10nm-250µm thickness range; 200-1700nm wavelength range.web.archive.org[1]
F60-t-XT——10µm-1mm thickness range; 1590-1650nm wavelength range.web.archive.org[1]
LineagePreceded by F50All related models
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What replaced it?

  • predecessorFilmetrics F50— The source says the F60-t family maps film thickness and index just like the F50 products.source[1]

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Included itemsIntegrated Stage/Spectrometer/Light Source Unit; 4", 6" and 200mm reference wafers; TS-Si02-4-7200 thickness standard; vacuum pump; hardcopy of operator's manual; connecting cables; spare lamp; tweezers[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the F60 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the F60 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the F60 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the F60 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the F60 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the F60 are on record.

    Answerable by: an OEM parts catalog or a service engineer

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]web.archive.org — web.archive.orgweb.archive.org
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Last updated Jul 29, 2026.