Waferpedia

Tool family

Filmetrics F60-t

The Filmetrics F60-t is a film thickness and index mapping instrument for production environments with automatic notch finding, on-board baselining, and an enclosed measurement stage with motion interlock.

Models in this family

  1. The Filmetrics F60-t is a film thickness and index mapping instrument for production environments with automatic notch finding, on-board baselining, and an enclosed measurement stage with motion interlock.

    Cited variants

    DesignationGenerationVintageChangesSource
    F60-tBase model listed with 20nm-50µm thickness range and 380-1050nm wavelength range.web.archive.org[1]
    F60-t-UV10nm-50µm thickness range and 200-1100nm wavelength range.web.archive.org[1]
    F60-t-NIR100nm-250µm thickness range and 950-1700nm wavelength range.web.archive.org[1]
    F60-t-EXR20nm-250µm thickness range and 380-1700nm wavelength range.web.archive.org[1]
    F60-t-UVX10nm-250µm thickness range and 200-1700nm wavelength range.web.archive.org[1]
    F60-t-XT10µm-1mm thickness range and 1590-1650nm wavelength range.web.archive.org[1]
    F60-s980Configuration stated with 4µm-1mm thickness range and 960-1000nm wavelength range.kla.com[2]
    F60-t-s1310Configuration stated with 7µm-2mm thickness range and 1280-1340nm wavelength range.unicorn-tech.com[3]
    F60-t-s1550Configuration stated with 10µm-3mm thickness range and 1520-1580nm wavelength range.unicorn-tech.com[3]

Sources

Sources (3)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org
  2. [2]kla.comkla.com
  3. [3]unicorn-tech.comunicorn-tech.com