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Filmetrics

F60-t

film thickness mapping instrumentFilmetrics F60-t family
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F60-t — web.archive.org
Fig. 01F60-tweb.archive.org[1]

What is it?

The Filmetrics F60-t family maps film thickness and index for production environments and is described as including automatic notch finding, automatic on-board baselining, an enclosed measurement stage with motion interlock, an industrial computer with pre-installed software, and an option for fully robotic wafer handling. The source lists multiple F60-t variants distinguished mainly by thickness range and wavelength range.

What can it run?

Process applications and technology nodes documented for this tool.

  • production environments

What do the numbers mean?

Optics & imaging1

Wavelength range
380-1050nm[1]2 sources
Accurate?

Control & software1

Computer
Industrial computer with pre-installed software[1]
Accurate?

Configuration & options4

Thickness range
20nm-50µm[1]
Accurate?
Automatic notch finding
Included[1]
Accurate?
Automatic on-board baselining
Included[1]
Accurate?
Measurement stage
Enclosed measurement stage with motion interlock[1]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
F60-t——Base model listed with 20nm-50µm thickness range and 380-1050nm wavelength range.web.archive.org[1]
F60-t-UV——10nm-50µm thickness range and 200-1100nm wavelength range.web.archive.org[1]
F60-t-NIR——100nm-250µm thickness range and 950-1700nm wavelength range.web.archive.org[1]
F60-t-EXR——20nm-250µm thickness range and 380-1700nm wavelength range.web.archive.org[1]
F60-t-UVX——10nm-250µm thickness range and 200-1700nm wavelength range.web.archive.org[1]
F60-t-XT——10µm-1mm thickness range and 1590-1650nm wavelength range.web.archive.org[1]
F60-s980——Configuration stated with 4µm-1mm thickness range and 960-1000nm wavelength range.kla.com[2]
F60-t-s1310——Configuration stated with 7µm-2mm thickness range and 1280-1340nm wavelength range.unicorn-tech.com[3]
F60-t-s1550——Configuration stated with 10µm-3mm thickness range and 1520-1580nm wavelength range.unicorn-tech.com[3]
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What replaced it?

  • siblingFilmetrics F50— The F60-t family maps film thickness and index just like the F50 products.source[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the F60-t are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the F60-t are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the F60-t are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the F60-t are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the F60-t is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the F60-t are on record.

    Answerable by: an OEM parts catalog or a service engineer

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (5)Every fact above is drawn from these public sources
  1. [1]web.archive.org — web.archive.orgweb.archive.org
  2. [2]kla.com — kla.comkla.com
  3. [3]unicorn-tech.com — unicorn-tech.comunicorn-tech.com
  4. [4]Filmetrics F60-t Film Thickness Mapper Brochure Download | Unicorn — unicorn-tech.comunicorn-tech.com
  5. [5]Filmetrics® F60-t Thin Film Thickness Mapping System - Automatic Thickness Mapping System - Yingbo Scientific instruments (Shanghai) co. LTD — ybsemi-solution.comybsemi-solution.com
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Last updated Jul 29, 2026.