Tool family
Filmetrics F80-A
The Filmetrics F80-A is a film thickness mapping tool for patterned wafers that combines full F80 functionality with Ricmar's WTT 300 Wafer Transfer Tool in a single EFEM platform.
Models in this family
- F80-Aintroduced 2010
The Filmetrics F80-A is a film thickness mapping tool for patterned wafers that combines full F80 functionality with Ricmar's WTT 300 Wafer Transfer Tool in a single EFEM platform.
