Filmetrics
F80-A
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Filmetrics F80-A is a film thickness mapping tool for patterned wafers. The Filmetrics F80-A integrates full F80 functionality with Ricmar's WTT 300 Wafer Transfer Tool in a single EFEM platform. The Filmetrics F80-A was introduced in 2010.[1][2]
What it is
How it works
General reference — not yet source-verifiedFilm thickness mapping tools of this class use spectral reflectance to measure the thickness of thin films on a substrate.
Where it fits in the process flow
The Filmetrics F80-A is used in semiconductor manufacturing for in-line product-wafer metrology, specifically to measure film thickness on patterned wafers.[2]
Applications
The F80-A is applied to patterned wafers for product-wafer metrology in semiconductor fabs.[2]
- Patterned wafers
- Product-wafer metrology
What do the numbers mean?
Wafer handling2
- Functionality
- Integrates full F80 functionality with Ricmar's WTT 300 Wafer Transfer Tool[1]2 sources
Configuration & options3
Vintage & configurations
- 2010Production start[2]
Introduced 2010
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What kind of tool is the Filmetrics F80-A?
The Filmetrics F80-A is a film thickness mapping tool for patterned wafers.[1][2]
What functions are integrated in the Filmetrics F80-A?
The Filmetrics F80-A integrates full F80 functionality with Ricmar's WTT 300 Wafer Transfer Tool.[1][2]
What platform arrangement does the Filmetrics F80-A use?
The Filmetrics F80-A combines its metrology and wafer-transfer functions in a single EFEM platform.[1][2]
Where does the Filmetrics F80-A fit in semiconductor manufacturing?
The Filmetrics F80-A is used for in-line product-wafer metrology in semiconductor manufacturing, specifically to measure film thickness on patterned wafers.[1][2]
When was the Filmetrics F80-A introduced?
The Filmetrics F80-A was introduced in 2010.[2]
Not publicly documented
The following facts about the F80-A are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented variants, configuration options, or revision breakpoints of the F80-A are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the F80-A are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the F80-A are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the F80-A is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the F80-A are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]web.archive.org — web.archive.orgweb.archive.org
- [2]waferpedia.com — waferpedia.comwaferpedia.com
Last updated Oct 20, 2026.