Filmetrics Profilm3D

Models in this family

1. Profilm3D

   Profilm3D is a Filmetrics optical profiler used for profilometry-based film thickness measurements and 3D surface profiling.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   Profilm3D-200	—	—	Adds a larger motorized X-Y stage supporting 200 mm by 200 mm travel; also supports an adapter for holding up to 200 mm wafers.	kla.com[1]

Sources