Tool family
GCA 6100 C Wafer
GCA 6100 C Wafer Stepper.
Models in this family
The GCA 6100 C Wafer Stepper is a lithography tool for 100 mm wafers with a 150 mm X/Y stage travel and an AWH1 automatic wafer handler.
Tool family
GCA 6100 C Wafer Stepper.
The GCA 6100 C Wafer Stepper is a lithography tool for 100 mm wafers with a 150 mm X/Y stage travel and an AWH1 automatic wafer handler.
