Waferpedia

Tool family

Headway PWM32

The Headway PWM32 is a spinner spin controller that was later upgraded to the PWM50.

Models in this family

  1. PWM32Legacy

    The Headway PWM32 is a spinner spin controller that was later upgraded to the PWM50.

    Cited variants

    DesignationGenerationVintageChangesSource
    PWM32-PS-CB15Up to 10,000 rpm; for relatively light loads such as silicon wafers and small photomasks; CB15 bowl with 15-inch I.D. and recommended substrate limits stated in the source.headwayresearch.com[1]
    PWM32-PS-R790Up to 10,000 rpm for relatively light loads such as silicon wafers and small photomasks; substrates up to a 5-inch maximum.headwayresearch.com[1]
    PWM32-BD-CB15Up to 2,500 rpm for heavy loads such as compact disk masters, thick E-beam masks, LCD panels, and substrates requiring high inertia chucks; substrates up to a recommended 12-inch maximum.headwayresearch.com[1]
    PWM32-BD-LS22For substrates larger than 12 inches, or for heavy substrates at higher than 2,500 rpm; LS22 described as the next larger bowl.headwayresearch.com[1]
    PWM32 Spin ControllerDescribed as the model that was upgraded and renamed PWM50.web.archive.org[2]

Sources

Sources (2)Every fact above is drawn from these public sources
  1. [1]headwayresearch.comheadwayresearch.com
  2. [2]web.archive.orgweb.archive.org