Headway
PWM32
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
Plate 01Headway Research PWM32/CB-15, Spin Coater/ Wet Bench. Inv# 63217
Bid ServicellcWatch on YouTubePlate 02Headway Research Spinner PWM32 컨트롤러 테스트 영상!
주식회사 엔지니어스톡Watch on YouTube
What is it?
What can it run?
Process applications and technology nodes documented for this tool.
- Spinner control
What do the numbers mean?
Control & software3
Vintage & configurations
- 2022Upgraded to PWM50[1]
The PWM32 Spin Controller had been upgraded and the new product was called PWM50.
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| PWM32-PS-CB15 | — | — | Up to 10,000 rpm; for relatively light loads such as silicon wafers and small photomasks; CB15 bowl with 15-inch I.D. and recommended substrate limits stated in the source. | headwayresearch.com[3] |
| PWM32-PS-R790 | — | — | Up to 10,000 rpm for relatively light loads such as silicon wafers and small photomasks; substrates up to a 5-inch maximum. | headwayresearch.com[3] |
| PWM32-BD-CB15 | — | — | Up to 2,500 rpm for heavy loads such as compact disk masters, thick E-beam masks, LCD panels, and substrates requiring high inertia chucks; substrates up to a recommended 12-inch maximum. | headwayresearch.com[3] |
| PWM32-BD-LS22 | — | — | For substrates larger than 12 inches, or for heavy substrates at higher than 2,500 rpm; LS22 described as the next larger bowl. | headwayresearch.com[3] |
| PWM32 Spin Controller | — | — | Described as the model that was upgraded and renamed PWM50. | web.archive.org[1] |
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the PWM32 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
The control-system platform and OS era of the PWM32 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the PWM32 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the PWM32 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the PWM32 are on record.
Answerable by: an OEM parts catalog or a service engineer
No publicly hosted manuals, SOPs, or datasheets for the PWM32 are on record.
Answerable by: university cleanroom staff or an OEM application specialist
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (6)Every fact above is drawn from these public sources
- [1]web.archive.org — web.archive.orgweb.archive.org
- [2]web.archive.org — web.archive.orgweb.archive.org
- [3]headwayresearch.com — headwayresearch.comheadwayresearch.com
- [4]Wayback Machine — web.archive.orgweb.archive.org
- [5]Headway PWM32 Wafer Spin Coater | Materials Research Laboratory | Illinois — mrl.illinois.edumrl.illinois.edu
- [6]HEADWAY PWM32 PHOTORESIST COATER - J.M. Industries — jmind.comjmind.com
Last updated Jul 29, 2026.