Heidelberg Instruments DWL66

Models in this family

1. 

   DWL66

   Heidelberg Instruments DWL66 is a high-resolution direct write pattern generator for direct writing on various substrates and mask making.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   DWL 66 fs	—	—	Described as a high accuracy maskless lithography system; accommodates substrate size up to 200 mm by 200 mm and can expose features down to 0.6 microns.	web.archive.org[1]

Sources