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Tool family

Heidelberg Instruments VPG200

Heidelberg InstrumentsLithography1 entry

Heidelberg Instruments VPG200 is a laser pattern generator used for mask production, direct exposure on SEMI-standard wafers, and mask reticles.

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Models in this family

  1. VPG200

    Heidelberg Instruments VPG200 is a laser pattern generator used for mask production, direct exposure on SEMI-standard wafers, and mask reticles.