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Tool family

Hitachi Kokusai DJ 853

HitachiThermal / Diffusion2 entries
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Models in this family

  1. Kokusai DJ 853 V

    Hitachi Kokusai DJ 853 V is a CVD (chemical vapor deposition) system for 8-inch wafers.

  2. Kokusai DJ 853 V J 3 Diffusion

All entries

  1. Kokusai DJ 853 VHitachi

    Hitachi Kokusai DJ 853 V is a CVD (chemical vapor deposition) system for 8-inch wafers.

    CategoryDeposition
    1 spec
  2. Kokusai DJ 853 V J 3 DiffusionHitachi
    CategoryThermal / Diffusion
    1 spec