Tool family
The Hitachi S 9200 is a scanning electron microscope (SEM) used for critical dimension (CD) measurements and wafer inspection, designed for 8-inch wafer processing.
The Hitachi S 9200 CD-SEM is a critical dimension scanning electron microscope.
The Hitachi S 9200 is a scanning electron microscope (SEM) used for critical dimension (CD) measurements and wafer inspection, designed for 8-inch wafer processing.
The Hitachi S 9200 CD-SEM is a critical dimension scanning electron microscope.