Waferpedia

Tool family

Hitachi S 9200

Models in this family

  1. The Hitachi S 9200 is a scanning electron microscope (SEM) used for critical dimension (CD) measurements and wafer inspection, designed for 8-inch wafer processing.

  2. The Hitachi S 9200 CD-SEM is a critical dimension scanning electron microscope.

All entries

  1. S 9200Hitachi

    The Hitachi S 9200 is a scanning electron microscope (SEM) used for critical dimension (CD) measurements and wafer inspection, designed for 8-inch wafer processing.

    CategoryMetrology & Inspection
    3 specs
  2. S 9200 CD-SEMHitachi

    The Hitachi S 9200 CD-SEM is a critical dimension scanning electron microscope.

    CategoryMetrology & Inspection
    4 specs