Waferpedia

Tool family

Hitachi S 9260

Models in this family

  1. The Hitachi S 9260 A is a CD-SEM used for critical dimension measurement in semiconductor manufacturing.

  2. The Hitachi S 9260 is a CD-SEM (Critical Dimension Scanning Electron Microscope).

All entries

  1. S 9260 A CD-SEMHitachi

    The Hitachi S 9260 A is a CD-SEM used for critical dimension measurement in semiconductor manufacturing.

    CategoryMetrology & Inspection
    4 specs
  2. S 9260 CD-SEMHitachi

    The Hitachi S 9260 is a CD-SEM (Critical Dimension Scanning Electron Microscope).

    CategoryMetrology & Inspection
    4 specs