Tool family
Hitachi S 9300 CD-SEM
Models in this family
The Hitachi S 9300 CD-SEM is a critical dimension scanning electron microscope with 8-inch wafer size support and imaging coverage stated for the entire surface of 8-inch or 12-inch wafers.
Tool family
The Hitachi S 9300 CD-SEM is a critical dimension scanning electron microscope with 8-inch wafer size support and imaging coverage stated for the entire surface of 8-inch or 12-inch wafers.
