Waferpedia

Tool family

Hitachi TM3030

The Hitachi TM3030 is a desktop/tabletop scanning electron microscope with secondary electron, backscatter electron, and mixed detection modes.

Models in this family

  1. The Hitachi TM3030 is a desktop/tabletop scanning electron microscope with secondary electron, backscatter electron, and mixed detection modes.

    Cited variants

    DesignationGenerationVintageChangesSource
    TM3030PlusVariant designation used in one source for the tabletop SEM; no difference from the base model is explicitly stated.smif.pratt.duke.edu[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]smif.pratt.duke.edusmif.pratt.duke.edu