Waferpedia

Tool family

Hitachi TM4000

HitachiMetrology & Inspection1 entry

The Hitachi TM4000 is identified in the sources as a scanning electron microscope entry on a Stanford Nano Shared Facilities equipment list.

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Models in this family

  1. TM4000

    Cited variants

    DesignationGenerationVintageChangesSource
    TM4000+———snsf.stanford.edu[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]snsf.stanford.edusnsf.stanford.edu