Waferpedia

Tool family

JEOL ML2

JEOLLithography1 entry

JEOL's ML2 is identified in the source as a maskless lithograph.

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Models in this family

  1. The JEOL ML2 is a maskless lithography system. The JEOL ML2 uses a patented ZrO/W (Schottky) emitter.

    Cited variants

    DesignationGenerationVintageChangesSource
    JBX-8100FS——Uses patented ZrO/W (Schottky) emitteren.wikipedia.org[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]en.wikipedia.orgen.wikipedia.org