Waferpedia

Tool family

Karl Suss PM5

The Karl Suss PM 5 Probe Station is a probe station with a stereo microscope, a 6-inch vacuum chuck, four micromanipulators, and a light-tight enclosure.

Models in this family

  1. The Karl Suss PM 5 Probe Station is a probe station with a stereo microscope, a 6-inch vacuum chuck, four micromanipulators, and a light-tight enclosure.