7 entries
- MA6Karl Suss
The Karl Suss MA6 is a high-resolution semi-automated photolithography mask aligner for research, development, and small-volume production.
CategoryLithographyWafer150mmNode1 micron and better; 0.6 µm under optimum conditions in vacuum mode - PM5Karl Suss
The Karl Suss PM 5 Probe Station is a probe station with a stereo microscope, a 6-inch vacuum chuck, four micromanipulators, and a light-tight enclosure.
CategoryWet Processing / CleanWaferup to 6-inch wafers - SB8Karl Suss
The Karl Suss SB8 Wafer Bonder supports silicon fusion, anodic, and eutectic bonding.
CategoryBackendWafer6" - MA6/BA6Karl Suss
The Karl Suss MA6/BA6 is a frontside/backside mask aligner used for high-resolution photolithography and photo alignment/exposure.
CategoryLithographyWaferSamples ranging in size from 10mm to 150mm - MJB-3Karl Suss
The Karl Suss MJB-3 is a contact/proximity mask aligner used with substrates up to 3 inches in diameter and capable of 365 nm or 405 nm illumination.
CategoryLithographyWafer3" - MA-4Karl Suss
The Karl Suss MA-4 is a contact/proximity mask aligner used for substrates up to 4" (100mm) in diameter.
CategoryLithographyWafer100mm - MA8Karl SussCategoryLithography
