Waferpedia

Tool family

KLA 2135

KLAMetrology & Inspection1 entry

The KLA 2135 is a wafer inspection system that uses advanced sensor and image processing technologies to detect yield-relevant defects on all process layers.

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  1. 2135

    The KLA 2135 is a wafer inspection system that uses advanced sensor and image processing technologies to detect yield-relevant defects on all process layers.