Waferpedia

Tool family

KLA 2139

KLAMetrology & Inspection2 entries
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Models in this family

  1. 2139 Brightfield
  2. 2139 UI Brightfield Patterned Surface Defect

    KLA 2139 UI is a brightfield patterned surface defect inspection system for 8-inch wafers.

All entries

  1. 2139 BrightfieldKLA
    CategoryMetrology & Inspection
    12 specs
  2. 2139 UI Brightfield Patterned Surface DefectKLA

    KLA 2139 UI is a brightfield patterned surface defect inspection system for 8-inch wafers.

    CategoryMetrology & Inspection
    2 specs