KLA AIT

Models in this family

1. 

   AIT II Defect

   KLA AIT II Defect Inspection System is an 8-inch wafer inspection system with SECS/GEM CIM, a dual handler system, and an open cassette 2000 factory interface.

2. AIT UV Darkfield
3. AIT UV Darkfield Defect

   KLA AIT UV Darkfield Defect Inspection is an inspection tool identified by model AIT UV.