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Tool family

KLA AIT XUV

KLAMetrology & Inspection2 entries
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Models in this family

  1. AIT XUV
  2. AIT XUV Darkfield

    KLA AIT XUV Darkfield Inspection is a KLA inspection system described with SECS/GEM CIM, FOUPS factory system, and a robot pillar handler system.

All entries

  1. AIT XUVKLA
    CategoryMetrology & Inspection
    5 specs
  2. AIT XUV DarkfieldKLA

    KLA AIT XUV Darkfield Inspection is a KLA inspection system described with SECS/GEM CIM, FOUPS factory system, and a robot pillar handler system.

    CategoryMetrology & Inspection
    6 specs