Tool family
The KLA Candela CS 10 R / CS 10 V is a wafer inspection system.
The KLA Candela CS 10 R Wafer Inspector is a single-phase wafer inspector with a 50/60 Hz, 5 A power specification and a booting upgrade requirement.
The KLA Candela CS 10 is a surface inspection system with source-stated examples from 2005 and 2007 vintages.
The KLA Candela CS 10 R / CS 10 V is a wafer inspection system.
The KLA Candela CS 10 R Wafer Inspector is a single-phase wafer inspector with a 50/60 Hz, 5 A power specification and a booting upgrade requirement.
The KLA Candela CS 10 is a surface inspection system with source-stated examples from 2005 and 2007 vintages.