Waferpedia

Tool family

KLA eDR

KLAMetrology & Inspection2 entries
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Models in this family

  1. eDR 5200 +
  2. eDR 5210 DR-SEM

    The KLA eDR 5210 DR-SEM is a defect review scanning electron microscope.

All entries

  1. eDR 5200 +KLA
    CategoryMetrology & Inspection
    1 spec
  2. eDR 5210 DR-SEMKLA

    The KLA eDR 5210 DR-SEM is a defect review scanning electron microscope.

    CategoryMetrology & Inspection
    4 specs