Waferpedia

Tool family

KLA HRP 340

KLA2 entries

Models in this family

  1. The KLA HRP 340 Thickness Measurement is a wafer thickness measurement tool for 12-inch wafers.

All entries

  1. HRP 340 SurfaceKLA
    CategoryMetrology & Inspection
    1 spec
  2. HRP 340 Thickness MeasurementKLA

    The KLA HRP 340 Thickness Measurement is a wafer thickness measurement tool for 12-inch wafers.

    CategoryMetrology & Inspection
    3 specs