Waferpedia

Tool family

KLA ILM 2139 Patterned Wafer

KLAMetrology & Inspection1 entry

KLA ILM 2139 Patterned Wafer Inspection.

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Models in this family

  1. ILM 2139 Patterned Wafer

    The KLA ILM 2139 is a patterned wafer inspection system.