Waferpedia

Tool family

KLA INS 3000

Models in this family

  1. KLA / Leica INS 3000 is an 8-inch DUV defect inspection system used for wafer transport check and related inspection checks.

All entries

  1. INS 3000KLA
    2 specs
  2. INS 3000 DUV DefectKLA

    KLA / Leica INS 3000 is an 8-inch DUV defect inspection system used for wafer transport check and related inspection checks.

    CategoryMetrology & InspectionWaferWafer transport check
    13 specs
  3. INS 3000 Macro DefectKLA
    CategoryMetrology & Inspection
    24 specs
  4. INS 3000 OpticalKLA
    CategoryMetrology & InspectionWaferUniversal wafer handler
    28 specs