KLA INS 3000

Models in this family

1. 

   INS 3000

   The KLA / Leica INS 3000 is an automated optical defect review system for 200mm wafers.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   INS 3300	—	—	Automated optical defect review system for 300mm wafers with UV and DUV optics, higher throughput.	web.archive.org[1]

2. 

   INS 3000 DUV Defect

   KLA / Leica INS 3000 is an 8-inch DUV defect inspection system used for wafer transport check and related inspection checks.

3. 

   INS 3000 Macro Defect

   The KLA / Leica INS 3000 Macro Defect is a macro defect inspection system designed for 8 inch (200 mm) wafers.

4. 

   INS 3000 Optical

   The INS 3000 is an optical inspection station with a fully automatic integrated microscope including UV and confocal, a universal wafer handler, front-loading cassette capacity for 1 to 3 cassettes including SMIF, and a Windows NT based graphical user interface.

Sources