Tool family
The KLA Surfscan SP 1 is an unpatterned wafer inspection system that uses laser scattering to detect surface defects on bare wafers.
Cited variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| SP1 TB1 | — | — | Bare wafer inspection variant; software version 3.5; 2X open cassette loading; 240 VAC single phase | rawbw.com[1] |
| SP1 DLS | — | — | Argon Ion Laser (488 nm); 0.050 µm defect sensitivity; includes Real Time Defect Classification and Map to Map capabilities | classoneequipment.com[2] |
| SP1 TBI | — | — | Referenced as a spare parts listing for SP1/SP1-TBI handler parts and lasers | metrologyequipmentservices.com[3] |
| SP1 XP | — | — | Listed as a variant in the same product family | metrologyequipmentservices.com[3] |