Waferpedia

Tool family

Lam Research 2300 Selis

Lam ResearchEtch1 entry

Models in this family

  1. The Lam 2300 Selis is a Lam Research etch chamber for dielectric etching, offered in a chamber-only configuration for 12-inch/300 mm wafers.

    Cited variants

    DesignationGenerationVintageChangesSource
    2300 SELIS - Chamber Only——Dielectric Etch process chamber; 300 mm version; chamber-only configuration.fabsurplus.com[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]fabsurplus.comfabsurplus.com