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Tool family

Lam Research Gasonics PEP 3510

Lam Research2 entries
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Models in this family

  1. Gasonics PEP 3510 Plus

    The Lam/Novellus/Gasonics PEP 3510 Plus is a semiconductor processing tool that handles 8-inch wafers and includes a 2 kW microwave generator.

    Cited variants

    DesignationGenerationVintageChangesSource
    PEP 3510 Plus (H)———Equipment inventory listing[1]
  2. Gasonics PEP 3510 Plus (H)

All entries

  1. Gasonics PEP 3510 PlusLam Research

    The Lam/Novellus/Gasonics PEP 3510 Plus is a semiconductor processing tool that handles 8-inch wafers and includes a 2 kW microwave generator.

    3 specs
  2. Gasonics PEP 3510 Plus (H)Lam Research
    3 specs

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing