Waferpedia

Tool family

Lam Research IPEC

Lam ResearchCMP3 entries
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Models in this family

  1. IPEC AvantGaard 776
  2. IPEC Avanti 472

    The Lam / IPEC Avanti 472 is a CMP (Chemical Mechanical Polisher) described as a fully automated single-wafer system for 4" to 8" wafers.

  3. IPEC Momentum

All entries

  1. IPEC AvantGaard 776Lam Research
    CategoryCMP
    1 spec
  2. IPEC Avanti 472Lam Research

    The Lam / IPEC Avanti 472 is a CMP (Chemical Mechanical Polisher) described as a fully automated single-wafer system for 4" to 8" wafers.

    CategoryCMPWaferSingle wafer
    3 specs
  3. IPEC MomentumLam Research
    CategoryCMP
    1 spec