Waferpedia

Tool family

Laurell WS-650MZ-23NPPB

The Laurell WS-650MZ-23NPPB is not explicitly described in the provided source text, but the source page lists Laurell equipment as part of a fabrication cleanroom facility and separately includes a Laurell spin coater model line in the equipment listing section.

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Models in this family

  1. The Laurell WS-650MZ-23NPPB is a spin coater for thin-film deposition and related coating processes on wafers and square substrates.