Waferpedia

Tool family

Leica DM8000

Leica DM8000 is described as a new generation optical inspection system with a digital camera.

Models in this family

  1. The Leica DM8000 M is an optical inspection system for 8-inch wafers that offers brightfield, darkfield, DIC, UV, and oblique illumination modes with a motorized nosepiece and integrated LED illumination.