Waferpedia

Tool family

memsstar Orbis Alpha

memsstarEtch1 entry

The Memsstar Orbis Alpha Oxide Etch System is a small-footprint, self-contained oxide etch system that uses hydrogen fluoride etchants.

Models in this family

  1. The Memsstar Orbis Alpha Oxide Etch System is a small-footprint, self-contained oxide etch system that uses hydrogen fluoride etchants.