memsstar

Orbis Alpha

Etch 200mm memsstar Orbis Alpha family

Research Quality: 30% complete

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memsstarOrbis Alpha

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Wafer size

200mm

Performance

< 5% 1σ^[1]

Gas delivery

hydrogen fluoride etchants^[1]

What is it?

The Memsstar Orbis Alpha Oxide Etch System is described as a small-footprint, self-contained oxide etch system that uses hydrogen fluoride etchants and a patented high-volume production process. It is stated to support development of production-capable processes for MEMS devices, handle sample sizes up to 200 mm, and provide PC control with a resistive touch screen.

What can it run?

Process applications and technology nodes documented for this tool.

RF MEMS
Sensors
RF switches
Temperature gauges
development of production-capable processes for MEMS devices

What do the numbers mean?

Gas & chemistry1

Process chemistry: hydrogen fluoride etchants^[1]

Performance2

Uniformity: < 5% 1σ^[1]
Repeatability: < 5% 1σ^[1]

Control & software2

Control: PC controlled^[1]
User interface: resistive touch screen^[1]

Dimensions & facilities2

Footprint: small footprint^[1]
Dimensions: 600 x 540 x 900 mm^[1]

Configuration & options3

System type: oxide etch system^[1]
Selectivity to silicon nitride and silicon dioxide: < 5% 1σ^[1]
Endpoint capability: unique endpoint capability^[1]

Interested in this tool?

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Process chemistryhydrogen fluoride etchants^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the Orbis Alpha are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Orbis Alpha are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Orbis Alpha are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Orbis Alpha are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Orbis Alpha are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Orbis Alpha is not on record.
Answerable by: an OEM datasheet or a fab qualification report