Waferpedia

Tool family

MPI TS2000-IFE

MPI1 entry

The MPI TS2000-IFE is a 200-mm automated probe station with micron precision used in a terahertz small-signal probe station configuration.

Models in this family

  1. The MPI TS2000-IFE is a 200-mm automated probe station with micron precision used in a terahertz small-signal probe station configuration.