Waferpedia

Tool family

Nanospec 210XP

NanospecReflectometry1 entry

The Nanospec 210XP is a reflectometry tool used for non-contact spectro-reflectometry and manual film thickness measurement of transparent films on reflective substrates.

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Models in this family

  1. 210XP

    The Nanospec 210XP is a reflectometry tool used for non-contact spectro-reflectometry and manual film thickness measurement of transparent films on reflective substrates.