Waferpedia

Tool family

Nanospec AFT-6100

The Nanospec AFT-6100 is a metrology instrument listed in the optical measurement section of the EPFL Center of MicroNanoTechnology (CMi) equipment portfolio.

Models in this family

  1. The Nanospec AFT-6100 is a metrology instrument listed in the optical measurement section of the EPFL Center of MicroNanoTechnology (CMi) equipment portfolio.