Nikon 1505

Models in this family

1. 1505produced 1988–

   Nikon 1505 is referenced in a lithography process condition as a g-line exposure tool with 0.54 NA.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   Nikon 1505 G 6 E	g-line	1988	A g-line stepper with 5x reduction and 650 nm resolution.	waferpedia.com[1]
   Nikon 1505 G 7 E	—	—	A stepper used in lithography on 6-inch wafers with a 5-inch reticle.	waferpedia.com[2]
   1505 G 6 E	g-line	1988	A g-line stepper with 5x reduction and 650 nm resolution.	waferpedia.com[2]
   1505 G 7 E	—	—	A stepper used in lithography on 6-inch wafers with a 5-inch reticle.	waferpedia.com[2]

2. 

   1505 G 6 Eproduced 1988–

   The Nikon 1505 G 6 E is a g-line stepper introduced in 1988 with a numerical aperture of 0.54 and a resolution of 650 nm.

3. 

   1505 G 7 E

   The Nikon 1505 G 7 E is a stepper used in lithography on 6-inch wafers with a 5-inch reticle.

Sources